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ISO/WD TR 23683

Surface chemical analysis — scanning probe microscopy — Guideline for experimental quantification of carrier concentration in semiconductor devices by using electric scanning probe microscopy

General information

20.99     5 sht 2020

ISO

ISO/TC 201/SC 9

Technical Report

71.040.40  

Scope

Life cycle

NOW

IN_DEVELOPMENT
ISO/WD TR 23683
20.99 WD approved for registration as CD
5 sht 2020