IEC/TR 63258:2021

Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Publication date: 22 mar 2021

General information

Current stage: 60.60 Effective date: 22 mar 2021

Originator: IEC

Owner: ISO/TC 229

Type: Technical Report

ICS: 07.120

Gjuha: anglisht

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Statusi: Publikuar

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Scope

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

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PUBLISHED
IEC/TR 63258:2021
60.60 Standard published
22 mar 2021