ISO 18516:2019

Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

Scope

This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are
— the straight edge method;
— the narrow line method;
— the grating method.
This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.