ISO 18554:2016

Surface chemical analysis — Electron spectroscopies — Procedures for identifying, estimating and correcting for unintended degradation by X-rays in a material undergoing analysis by X-ray photoelectron spectroscopy

Scope

ISO 18554:2016 provides a simple procedure for identifying, estimating and correcting for unintended degradation in the elemental composition or chemical state of a material which occurs as a result of X-radiation during the time that a specimen material is exposed to the X-rays used in X-ray photoelectron spectroscopy (XPS).
ISO 18554:2016 does not address comparisons between different types of material nor does it address the mechanisms, depth, or chemical nature of the degradation that occurs. The correction procedure proposed is only valid if the changes are caused by the X-rays and result in less than a 30 % reduction or increase in intensity of a chosen photoelectron peak from the sample material.