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IEC 62047-32:2019 ED1

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
24 jan 2019

General information

60.60     24 jan 2019

IEC

TC 47/SC 47F

International Standard

31.080.99  

anglisht   frëngjisht  

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Scope

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

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NOW

PUBLISHED
IEC 62047-32:2019 ED1
60.60 Standard published
24 jan 2019

National adoptions

SSH IEC 62047-32:2019 ED1  
DPS

Pajisje gjysmëpërçuese - Pajisjet mikro-elektromekanike - Pjesa 32: Metoda e provës për dridhjet jolineare të rezonatorëve të MEMS-it

60.60 Standard published

DPS/KT 7 më tepër