IEC 62047-1:2016 ED2

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Publication date: 6 jan 2016

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Current stage: 60.60 Effective date: 6 jan 2016

Originator: IEC

Owner: TC 47/SC 47F

Type: International Standard

ICS: 31.080.99

Gjuha: anglisht frëngjisht

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Statusi: Publikuar

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IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.

IEC 62047-1:2016 ED2

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

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