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PNW 47F-582 ED1

Semiconductor devices – Micro-electromechanical devices – Part 70 :Double Cantilever Beam Test with Compliance Measurement for MEMS Hybrid Bonding Interface Characterization

General information

10.20     30 tet 2026

PRVN    22 jan 2027

IEC

TC 47/SC 47F

International Standard

Scope

Life cycle

NOW

IN_DEVELOPMENT
PNW 47F-582 ED1
10.20 New project ballot initiated
30 tet 2026