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PNW 47F-577 ED1

Semiconductor devices - Micro-electromechanical devices - Part 69: MEMS packaging residual stress test methods based on stress amplification structure

General information

10.20     16 tet 2026

PRVN    8 jan 2027

IEC

TC 47/SC 47F

International Standard

Scope

Life cycle

NOW

IN_DEVELOPMENT
PNW 47F-577 ED1
10.20 New project ballot initiated
16 tet 2026