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PNW 47F-577 ED1

Semiconductor devices - Micro-electromechanical devices - Part 69: MEMS packaging residual stress test methods based on stress amplification structure

General information

00.99     24 sht 2026

PNW   

IEC

TC 47/SC 47F

International Standard

Scope

Life cycle

NOW

IN_DEVELOPMENT
PNW 47F-577 ED1
00.99 Approval to ballot proposal for new project
24 sht 2026