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PNW 47-3048 ED1

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 2: Nano-scale wafer surface inspection method using white light interferometry

General information

10.20     25 sht 2026

PRVN    18 dhj 2026

IEC

TC 47

International Standard

Scope

Life cycle

NOW

IN_DEVELOPMENT
PNW 47-3048 ED1
10.20 New project ballot initiated
25 sht 2026