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PNW 47-3017 ED1

Semiconductor device - The recognition criteria of defects in indium phosphide epitaxial wafers - Part 3: Test method for defects using scanning electron microscopy

General information

10.60     10 korr 2026

IEC

TC 47

International Standard

Scope

Life cycle

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PNW 47-3017 ED1
10.60 Close of voting
10 korr 2026