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IEC 62047-61 ED1

Semiconductor devices - Micro-electromechanical systems - Part 61: Evaluation methods of localized deformation and stretchability for Hybrid MEMS materials

General information

30.99     4 sht 2026

TCDV    26 shk 2027

IEC

TC 47/SC 47F

International Standard

31.080.99  

Scope

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-61 ED1
30.99 CD approved for registration as DIS
4 sht 2026