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IEC TS 62607-8-6 ED1

Nanomanufacturing - Key control characteristics - Part 8-6: Metal-oxide interfacial devices - Optical properties: Spectroscopic ellipsometry

General information

20.99     2 gush 2024

CD    17 jan 2025

IEC

TC 113

Technical Specification

Scope

Life cycle

NOW

IN_DEVELOPMENT
IEC TS 62607-8-6 ED1
20.99 WD approved for registration as CD
2 gush 2024