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IEC 62047-54 ED1

Semiconductor devices - Micro-electromechanical devices - Part 54: Silicon based MEMS fabrication technology – Measurement method of tensile strength of microstructures

General information

40.00     12 qer 2026

CCDV    31 korr 2026

IEC

TC 47/SC 47F

International Standard

31.080.99  

Scope

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-54 ED1
40.00 DIS registered
12 qer 2026