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IEC 62047-54 ED1

Micro-electromechanical devices - Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile

General information

20.99     5 korr 2024

CD    24 jan 2025

IEC

TC 47/SC 47F

International Standard

31.080.99  

Scope

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-54 ED1
20.99 WD approved for registration as CD
5 korr 2024