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IEC TS 62607-8-5 ED1

Nanomanufacturing - Key Control Characteristics - Part 8-5: Nano-enabled metal-oxide interfacial devices - Oxygen distribution: Secondary ion mass spectrometry (SIMS)

General information

20.99     31 korr 2024

IEC

TC 113

Technical Specification

Scope

Life cycle

NOW

IN_DEVELOPMENT
IEC TS 62607-8-5 ED1
20.99 WD approved for registration as CD
31 korr 2024