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ISO/CD TS 25138

Surface chemical analysis — Analysis of metal oxide films by glow discharge optical emission spectrometry

General information

30.00     Sep 29, 2023

ISO

ISO/TC 201/SC 8

Technical Specification

Scope

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

Life cycle

PREVIOUSLY

Revises
ISO/TS 25138:2019

NOW

IN_DEVELOPMENT
ISO/CD TS 25138
30.00 Committee draft (CD) registered
Sep 29, 2023

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