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IEC 63581-1 ED1

Semiconductor devices - The recognition criteria of defects in polished indium phosphide wafers - Part 1: Classification of defects

General information

30.60     Oct 11, 2024

IEC

TC 47

International Standard

31.080.99  

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IEC 63581-1 ED1
30.60 Close of voting/ comment period
Oct 11, 2024