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SSH IEC 62047-28:2017 ED1

Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices

Oct 29, 2021

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60.60     Oct 29, 2021

95.99   

DPS

DPS/KT 7

International Standard

31.080.99  

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Scope

IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.

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SSH IEC 62047-28:2017 ED1
60.60 Standard published
Oct 29, 2021

Related project

Adopted from IEC 62047-28:2017 ED1 IDENTICAL