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SSH EN 62047-1:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Apr 13, 2017

General information

60.60     Feb 2, 2017

DPS

DPS/KT 7

European Norm

31.080.99  

English  

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Scope

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices.
This edition includes the following significant technical changes with respect to the previous edition:

a) removal of ten terms;

b) revision of twelve terms;

c) addition of sixteen new terms.

Life cycle

PREVIOUSLY

WITHDRAWN
SSH EN 62047-1:2006

NOW

PUBLISHED
SSH EN 62047-1:2016
60.60 Standard published
Feb 2, 2017

Related project

Adopted from EN 62047-1:2016

Adopted from IEC 62047-1 Ed. 2.0 b