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SSH EN 62047-1:2006

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Aug 14, 2008
95.99 Withdrawal of Standard   May 7, 2019

General information

95.99     May 7, 2019

DPS

DPS/KT 7

European Norm

31.080.99  

English  

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Scope

This part of EN 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

Life cycle

NOW

WITHDRAWN
SSH EN 62047-1:2006
95.99 Withdrawal of Standard
May 7, 2019

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PUBLISHED
SSH EN 62047-1:2016

Related project

Adopted from EN 62047-1:2006

Adopted from IEC 62047-1 Ed. 1.0 b