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ISO 21360-4:2018

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps

Jul 31, 2018

General information

90.92     Jun 14, 2024

ISO

ISO/TC 112

International Standard

23.160  

English   French  

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Scope

This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those
— with mechanical or magnetic bearings;
— with or without an additional drag stage(s) or other pumping stages on the shaft;
— with one or more inlet ports.
Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance.
The following completes the performance characteristics:
— information about throughputs and backing pressure of the turbomolecular vacuum pump;
— the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump).

Life cycle

NOW

PUBLISHED
ISO 21360-4:2018
90.92 Standard to be revised
Jun 14, 2024

REVISED BY

IN_DEVELOPMENT
ISO/AWI 21360-4