ISO/TR 14999-3:2005

Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 3: Calibration and validation of interferometric test equipment and measurements

Publication date: Mar 16, 2005

General information

Current stage: 60.60 Effective date: Mar 16, 2005

Originator: ISO

Owner: ISO/TC 172/SC 1

Type: Technical Report

ICS: 37.020

Languages: English

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Status: Published

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Scope

ISO/TR 14999-3:2005 discusses sources of error and the separation of errors into symmetric and non-symmetric parts. It also describes the reliance of measurements on the quality of a physical reference surface and the development of test procedures capable of achieving absolute calibration.

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PUBLISHED
ISO/TR 14999-3:2005
60.60 Standard published
Mar 16, 2005