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IEC 62047-1:2005 ED1

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Sep 27, 2005

General information

99.60     Jan 6, 2016

IEC

TC 47/SC 47F

International Standard

31.080.99  

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Revised

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Scope

This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

Life cycle

NOW

WITHDRAWN
IEC 62047-1:2005 ED1
99.60 Withdrawal effective
Jan 6, 2016

REVISED BY

PUBLISHED
IEC 62047-1:2016 ED2