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IEC 62047-55 ED1

Semiconductor devices - Micro-electromechanical devices - Part 55: Silicon based MEMS fabrication technology - Test method of microstructure pendulum impact

General information

30.60     Jan 30, 2026

IEC

TC 47/SC 47F

International Standard

31.080.99  

Life cycle

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IN_DEVELOPMENT
IEC 62047-55 ED1
30.60 Close of voting/ comment period
Jan 30, 2026