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IEC 62047-53 ED1

Semiconductor devices - Micro-electromechanical devices - Part 53: MEMS electrothermal transfer device

General information

50.00     Jun 26, 2025

CFDIS    Sep 18, 2025

IEC

TC 47/SC 47F

International Standard

31.080.99  

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-53 ED1
50.00 Final text received or FDIS registered for formal approval
Jun 26, 2025