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IEC 62374:2007 ED1

Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films

Publication date: Mar 29, 2007

General information

Current stage: 60.60 Effective date: Mar 29, 2007

Originator: IEC

Owner: TC 47

Type: International Standard

ICS: 31.080.99

Languages: English French

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Status: Published

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Scope

Provides a test method of Time Dependent Dielectric Breakdown
(TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure

Life cycle

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PUBLISHED
IEC 62374:2007 ED1
60.60 Standard published
Mar 29, 2007