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IEC 63068-5 ED1

Semiconductor devices - Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 5: Test method for defects using X-ray topography

General information

50.99     Nov 21, 2025

IEC

TC 47

International Standard

31.080.99  

Life cycle

NOW

IN_DEVELOPMENT
IEC 63068-5 ED1
50.99 FDIS or proof approved for publication
Nov 21, 2025