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IEC 62047-46 ED1

Semiconductor devices - Micro-electromechanical devices - Part 46: Silicon based MEMS fabrication technology - Measurement method of tensile strength of nanoscale thickness membrane

General information

50.00     Apr 29, 2024

CFDIS    Jul 22, 2024

IEC

TC 47/SC 47F

International Standard

31.080.99  

Life cycle

NOW

IN_DEVELOPMENT
IEC 62047-46 ED1
50.00 Final text received or FDIS registered for formal approval
Apr 29, 2024