This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
WITHDRAWN
SSH EN ISO 25178-604:2013
IN_DEVELOPMENT
prSSH EN ISO 25178-604:2025
40.60
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May 11, 2026