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SSH ISO 23420:2023

Microbeam analysis — Analytical electron microscopy — Method for the determination of energy resolution for electron energy loss spectrum analysis

Oct 31, 2023

General information

60.60     Oct 31, 2023

95.99   

DPS

DPS/KT 302

International Standard

71.040.50  

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Scope

This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.
This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.

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PUBLISHED
SSH ISO 23420:2023
60.60 Standard published
Oct 31, 2023

Related project

Adopted from ISO 23420:2021