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SSH IEC 62047-32:2019 ED1

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

Oct 29, 2021

General information

60.60     Oct 29, 2021

95.99   

DPS

DPS/KT 7

International Standard

31.080.99  

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IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

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PUBLISHED
SSH IEC 62047-32:2019 ED1
60.60 Standard published
Oct 29, 2021

Related project

Adopted from IEC 62047-32:2019 ED1 IDENTICAL