Published
IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices. It has the status of a horizontal standard in accordance with IEC Guide 108:2006. This terminology is consistent with the terminology developed in the other specialized parts of the IEV.
PUBLISHED
SSH IEC 60050-523:2018
60.60
Standard published
Jan 29, 2019