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SSH EN ISO 14644-10:2013

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

Dec 16, 2015
95.99 Withdrawal of Standard   Nov 10, 2023

General information

95.99     Nov 10, 2023

DPS

DPS/KT 230

European Norm

13.040.35  

English  

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Scope

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Life cycle

NOW

WITHDRAWN
SSH EN ISO 14644-10:2013
95.99 Withdrawal of Standard
Nov 10, 2023

REVISED BY

PUBLISHED
SSH EN ISO 14644-10:2022

Related project

Adopted from EN ISO 14644-10:2013