SSH EN 62374:2007

Semiconductor devices - Time Dependent Dielectric Breakdown (TDDB) test for gate dielectric films

Publication date: Oct 16, 2008

General information

Current stage: 60.60 Effective date: Jan 1, 2008

Originator: DPS

Owner: DPS/KT 7

Type: European Norm

ICS: 31.080

Languages: English

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Status: Published

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Scope

Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure

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PUBLISHED
SSH EN 62374:2007
60.60 Standard published
Jan 1, 2008

Related project

Adopted from EN 62374:2007

Adopted from IEC 62374 Ed. 1.0 b

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