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ISO/NP 26897

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating pixel size on digital image of SEM and FIB-SEM

General information

Current stage: 10.20 Effective date: Jun 28, 2026

Originator: ISO

Owner: ISO/TC 202/SC 4

Type: International Standard

Scope

This document specifies a method for calibrating the pixel size and FOV of digital images acquired using an SEM and an FIB-SEM, by employing an appropriate reference material. The applicable range of pixel size and FOV is limited by the structural dimensions available in the reference material used for calibration.

Life cycle

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IN_DEVELOPMENT
ISO/NP 26897
10.20 New project ballot initiated
Jun 28, 2026