10.20 Apr 10, 2026
ISO
ISO/TC 107
International Standard
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a semi-transparent layer and for the determination of the optical (refractive index n and extinction coefficient k) or dielectric (real part ε1 and imaginary part ε2) constants/functions based on the semi-transparent single layer model.
IN_DEVELOPMENT
ISO/NP 23131-4
10.20
New project ballot initiated
Apr 10, 2026