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ISO/NP 23131-4

Ellipsometry — Part 4: Semi-transparent single layer model

General information

10.20     Apr 10, 2026

ISO

ISO/TC 107

International Standard

Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a semi-transparent layer and for the determination of the optical (refractive index n and extinction coefficient k) or dielectric (real part ε1 and imaginary part ε2) constants/functions based on the semi-transparent single layer model.

Life cycle

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IN_DEVELOPMENT
ISO/NP 23131-4
10.20 New project ballot initiated
Apr 10, 2026