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ISO/NP 23131-4

Ellipsometry — Part 4: Semi-transparent single layer model

General information

Current stage: 10.60 Effective date: Jul 4, 2026

Originator: ISO

Owner: ISO/TC 107

Type: International Standard

Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a semi-transparent layer and for the determination of the optical (refractive index n and extinction coefficient k) or dielectric (real part ε1 and imaginary part ε2) constants/functions based on the semi-transparent single layer model.

Life cycle

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IN_DEVELOPMENT
ISO/NP 23131-4
10.60 Close of voting
Jul 4, 2026