ISO/AWI 26372

Fine ceramics (advanced ceramics, advanced technical ceramics) — Methods for chemical analysis of metal impurities in magnesium oxide powders using iductively coupled plasma-optical emission spectrometry

Scope

This document specifies a method for the chemical analysis of metallic impurities present in magnesium oxide (MgO) powders used as raw materials for fine ceramics. The method covers the determination of aluminium (Al), calcium (Ca), chromium (Cr), iron (Fe), manganese (Mn), nickel (Ni), strontium (Sr), titanium (Ti), and vanadium (V) by inductively coupled plasma optical emission spectrometry (ICP-OES) after acid decomposition of the sample.
This standard is applicable to magnesium oxide powders used for advanced ceramic components, particularly those employed in plasma processing environments for semiconductors and electronic devices, where trace metallic impurities critically affect performance, reliability, and lifetime of the products.