ISO/AWI 26100

Microbeam analysis — Analytical electron microscopy — The thickness measurement of thin foil by electron energy loss spectroscopy

Scope

This document specifies procedures for the measurement of the foil thickness of the specimen by a combination of (scanning) transmission electron microscope (STEM/TEM) and electron energy-loss spectroscopy (EELS).
This document applies to measuring the foil thickness less than the thickness of electron transparency.
Accurate measurement of thin foil thickness is paramount for STEM/TEM characterization of materials, and several methods have been proposed. Among them, EELS is a representative method because, unlike other methods, it can be applied regardless of the state of the material. Low-loss spectra including zero-loss and plasmon peaks are used for the measurement.