ISO/PWI 25835

Microbeam analysis - Analytical electron microscope - Method for data acquisition and processing of three-dimensional electron diffraction to determine the structures of nano/micro-crystals

Scope

This document specifies the data acquisition and processing method for three-dimensional electron diffraction using a transmission electron microscope (TEM) to determine the structures of micro/nano crystalline specimens. It provides detailed guidelines on specimen preparation, instrument setup, data acquisition, data processing and results reporting for three-dimensional electron diffraction.