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ISO/PRF 25164

Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification

General information

50.00     Apr 16, 2026

ISO

ISO/TC 107/SC 9

International Standard

25.220.40  

Scope

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.

Life cycle

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IN_DEVELOPMENT
ISO/PRF 25164
50.00 Final text received or FDIS registered for formal approval
Apr 16, 2026