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ISO 17297:2025

Microbeam analysis — Focused ion beam application for TEM specimen preparation — Vocabulary

May 26, 2025

General information

60.60     May 26, 2025

ISO

ISO/TC 202/SC 1

International Standard

01.040.71     71.040.50  

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This document defines the most commonly used terms for transmission electron microscopy (TEM) specimen preparation using focused ion beam (FIB).

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PUBLISHED
ISO 17297:2025
60.60 Standard published
May 26, 2025