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ISO 14606:2022

Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials

Nov 21, 2022

General information

60.60     Nov 21, 2022

ISO

ISO/TC 201/SC 4

International Standard

71.040.40  

English  

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Scope

This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
This document is not intended to cover the use of special multilayered systems such as delta doped layers.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 14606:2015

NOW

PUBLISHED
ISO 14606:2022
60.60 Standard published
Nov 21, 2022