ISO 18115-3:2022

Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis

Publication date: Jun 30, 2022

General information

Current stage: 60.60 Effective date: Jun 30, 2022

Originator: ISO

Owner: ISO/TC 201/SC 1

Type: International Standard

ICS: 01.040.71 71.040.40

Languages: English

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Status: Published

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This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

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PUBLISHED
ISO 18115-3:2022
60.60 Standard published
Jun 30, 2022