Published
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
PUBLISHED
ISO 25178-607:2019
90.93
Standard confirmed
Jun 6, 2024
IN_DEVELOPMENT
ISO/PWI 25178-607
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