ISO 20146:2019

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

Publication date: Jan 31, 2019

General information

Current stage: 90.93 Effective date: Jun 10, 2024

Originator: ISO

Owner: ISO/TC 112

Type: International Standard

ICS: 23.160

Languages: English French

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Status: Published

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Scope

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.
This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

Life cycle

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PUBLISHED
ISO 20146:2019
90.93 Standard confirmed
Jun 10, 2024