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ISO 14644-2:2015

Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

Dec 9, 2015

General information

90.93     Aug 13, 2021

ISO

ISO/TC 209

International Standard

13.040.35  

English   French  

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Published

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Scope

ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 14644-2:2000

NOW

PUBLISHED
ISO 14644-2:2015
90.93 Standard confirmed
Aug 13, 2021

National adoptions

SSH EN ISO 14644-2:2015  
DPS

Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015)

60.60 Standard published

DPS/KT 230 more