ISO 13095:2014

Surface Chemical Analysis — Atomic force microscopy — Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement

Scope

ISO 13095:2014 specifies two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles. These methods project the profile of an AFM probe tip onto a given plane, and the characteristics of the probe shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a given probe for depth measurements in narrow trenches and similar profiles. This International Standard is applicable to the probes with radii greater than 5u0, where u0 is the uncertainty of the width of the ridge structure in the reference sample used to characterize the probe.