ISO 22309:2006

Microbeam analysis — Quantitative analysis using energy-dispersive spectrometry (EDS)

Scope

ISO 22309:2006 gives guidance on the quantitative analysis at specific points or areas of a specimen using energy-dispersive spectrometry (EDS) fitted to a scanning electron microscope (SEM) or electron probe microanalyser (EPMA); any expression of amount, i.e. in terms of percent (mass fraction), as large/small or major/minor amounts is deemed to be quantitative. The correct identification of all elements present in the specimen is a necessary part of quantitative analysis and is therefore considered in ISO 22309:2006. ISO 22309:2006 provides guidance on the various approaches and is applicable to routine quantitative analysis of mass fractions down to 1 %, utilising either reference materials or standardless procedures. It can be used with confidence for elements with atomic number Z greater than 10.
Guidance on the analysis of light elements with Z less than 11 is also given.