ISO 14594:2003

Microbeam analysis — Electron probe microanalysis — Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy

Scope

ISO 14594:2003 gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth and analysis volume.
ISO 14594:2003 is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained may only be indicative for other experimental conditions.