IEC TS 62607-9-1:2021 ED1

Nanomanufacturing - Key control characteristics - Part 9-1: Traceable spatially resolved nano-scale stray magnetic field measurements - Magnetic force microscopy

Publication date: Oct 14, 2021

General information

Current stage: 60.60 Effective date: Oct 14, 2021

Originator: IEC

Owner: TC 113

Type: Technical Specification

ICS: 07.120

Languages: English

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Status: Published

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Scope

IEC TS 62607-9-1:2021(E) establishes a standardized method to characterize spatially varying magnetic fields with a spatial resolution down to 10 nm for flat magnetic specimens by magnetic force microscopy (MFM). MFM primarily detects the stray field component perpendicular to the sample surface. The resolution is achieved by the calibration of the MFM tip using magnetically nanostructured reference materials.

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PUBLISHED
IEC TS 62607-9-1:2021 ED1
60.60 Standard published
Oct 14, 2021