This document specifies the design and metrological characteristics of point autofocus probe (PAP) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
WITHDRAWN
SSH EN ISO 25178-605:2014
IN_DEVELOPMENT
prSSH EN ISO 25178-605:2025
40.60
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May 11, 2026